Silicon tetrafluoride


Silicon tetrafluoride
Silicon tetrafluoride
Silicon tetrafluoride
IUPAC names
Silicon tetrafluoride
Other names
Silicon fluoride
Fluoro acid air
  • 7783-61-1 checkY
3D model (JSmol)
  • Interactive image
ECHA InfoCard 100.029.104 Edit this at Wikidata
  • 24556
RTECS number
  • VW2327000
  • K60VCI56YO checkY
UN number 1859
  • DTXSID0064830 Edit this at Wikidata
  • F[Si](F)(F)F
Molar mass 104.0791 g/mol
Appearance colourless gas, fumes in moist air
Density 1.66 g/cm3, solid (−95 °C)
4.69 g/L (gas)
Melting point −95.0 °C (−139.0 °F; 178.2 K)[1]
Boiling point −90.3 °C (−130.5 °F; 182.8 K)[1]
0 D
Occupational safety and health (OHS/OSH):
Main hazards
toxic, corrosive
NFPA 704 (fire diamond)
Lethal dose or concentration (LD, LC):
69,220 mg/m3 (rat, 4 hr)[2]
Safety data sheet (SDS) ICSC 0576
Related compounds
Other anions
Silicon tetrachloride
Silicon tetrabromide
Silicon tetraiodide
Other cations
Carbon tetrafluoride
Germanium tetrafluoride
Tin tetrafluoride
Lead tetrafluoride
Related compounds
Hexafluorosilicic acid
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
checkY verify (what is checkY☒N ?)
Infobox references

Silicon tetrafluoride or tetrafluorosilane is the chemical compound with the formula SiF4. This colorless compound is notable for having a narrow liquid range: its boiling point is only 4 °C above its melting point. It was first synthesized by John Davy in 1812.[3] It is a tetrahedral molecule.


is a by-product of the production of phosphate fertilizers, resulting from the attack of HF (derived from fluorapatite protonolysis) on silicates, which are present as impurities in the phosphate rock. In the laboratory, the compound is prepared by heating BaSiF
above 300 °C, whereupon the solid releases volatile SiF
, leaving a residue of BaF
. The required BaSiF
is prepared by treating aqueous hexafluorosilicic acid with barium chloride.[4] The corresponding GeF
is prepared analogously, except that the thermal "cracking" requires 700 °C.[5] SiF
can in principle also be generated by the reaction of silicon dioxide and hydrofluoric acid, but this process tends to give hexafluorosilicic acid:

6 HF + SiO2 → H2SiF6 + 2 H2O


This volatile compound finds limited use in microelectronics and organic synthesis.[6]


Volcanic plumes contain significant amounts of silicon tetrafluoride. Production can reach several tonnes per day.[7] Some amounts are also emitted from spontaneous coal fires.[8] The silicon tetrafluoride is partly hydrolysed and forms hexafluorosilicic acid.


  1. ^ a b Silicon Compounds, Silicon Halides. Collins, W.: Kirk-Othmer Encyclopedia of Chemical Technology; John Wiley & Sons, Inc, 2001.
  2. ^ "Fluorides (as F)". Immediately Dangerous to Life or Health Concentrations (IDLH). National Institute for Occupational Safety and Health (NIOSH).
  3. ^ John Davy (1812). "An Account of Some Experiments on Different Combinations of Fluoric Acid". Philosophical Transactions of the Royal Society of London. 102: 352–369. doi:10.1098/rstl.1812.0020. ISSN 0261-0523. JSTOR 107324.
  4. ^ Hoffman, C. J.; Gutowsky, H. S. (1953). "Silicon Tetrafluoride". Inorganic Syntheses. Inorganic Syntheses. Vol. 4. pp. 145–6. doi:10.1002/9780470132357.ch47. ISBN 9780470132357.{{cite book}}: CS1 maint: uses authors parameter (link)
  5. ^ Hoffman, C. J.; Gutowsky, H. S. (1953). Silicon Tetrafluoride. Inorganic Syntheses. Vol. 4. pp. 147–8. doi:10.1002/9780470132357.ch48.{{cite book}}: CS1 maint: uses authors parameter (link)
  6. ^ Shimizu, M. "Silicon(IV) Fluoride" Encyclopedia of Reagents for Organic Synthesis, 2001 John Wiley & Sons. doi:10.1002/047084289X.rs011
  7. ^ T. Mori; M. Sato; Y. Shimoike; K. Notsu (2002). "High SiF4/HF ratio detected in Satsuma-Iwojima volcano's plume by remote FT-IR observation" (PDF). Earth Planets Space. 54 (3): 249–256. doi:10.1186/BF03353024. S2CID 55173591.
  8. ^ Kruszewski, Ł., Fabiańska, M.J., Ciesielczuk, J., Segit, T., Orłowski, R., Motyliński, R., Moszumańska, I., Kusy, D. 2018 – First multi-tool exploration of a gas-condensate-pyrolysate system from the environment of burning coal mine heaps: An in situ FTIR and laboratory GC and PXRD study based on Upper Silesian materials. Science of the Total Environment, 640-641, 1044-1071; DOI: 10.1016/j.scitotenv.2018.05.319